JPH078069Y2 - チップ洗浄用トレィセット - Google Patents

チップ洗浄用トレィセット

Info

Publication number
JPH078069Y2
JPH078069Y2 JP12243790U JP12243790U JPH078069Y2 JP H078069 Y2 JPH078069 Y2 JP H078069Y2 JP 12243790 U JP12243790 U JP 12243790U JP 12243790 U JP12243790 U JP 12243790U JP H078069 Y2 JPH078069 Y2 JP H078069Y2
Authority
JP
Japan
Prior art keywords
chip
tray
cleaning
cover
storage tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12243790U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0481686U (en]
Inventor
弘樹 狩野
俊彦 流王
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP12243790U priority Critical patent/JPH078069Y2/ja
Publication of JPH0481686U publication Critical patent/JPH0481686U/ja
Application granted granted Critical
Publication of JPH078069Y2 publication Critical patent/JPH078069Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP12243790U 1990-11-26 1990-11-26 チップ洗浄用トレィセット Expired - Lifetime JPH078069Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12243790U JPH078069Y2 (ja) 1990-11-26 1990-11-26 チップ洗浄用トレィセット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12243790U JPH078069Y2 (ja) 1990-11-26 1990-11-26 チップ洗浄用トレィセット

Publications (2)

Publication Number Publication Date
JPH0481686U JPH0481686U (en]) 1992-07-16
JPH078069Y2 true JPH078069Y2 (ja) 1995-03-01

Family

ID=31870218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12243790U Expired - Lifetime JPH078069Y2 (ja) 1990-11-26 1990-11-26 チップ洗浄用トレィセット

Country Status (1)

Country Link
JP (1) JPH078069Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5220461B2 (ja) * 2008-03-31 2013-06-26 京セラクリスタルデバイス株式会社 洗浄治具

Also Published As

Publication number Publication date
JPH0481686U (en]) 1992-07-16

Similar Documents

Publication Publication Date Title
KR970013088A (ko) 폴리싱 장치
KR20170100854A (ko) 기판 세정 장치 및 이를 이용한 기판 세정 설비
JP2004247467A (ja) 薄板収納容器
JPH078069Y2 (ja) チップ洗浄用トレィセット
US4951425A (en) Computer and video game cleaning cartridge
JP4174557B2 (ja) ウエハ等精密基板収容容器
JP3093068B2 (ja) ウェーハケース
US3640294A (en) Electric sonic device for cleaning small articles
JP2514030Y2 (ja) チップトレィ
JP2513899B2 (ja) 集積回路用チップトレ―
JPS63178972A (ja) 製品収納容器
JP4405105B2 (ja) シール部材保持具
JP4062927B2 (ja) 光学素子の洗浄治具
JPH0728954Y2 (ja) 被処理板用支持治具
JPH0650981Y2 (ja) ディスク洗浄用バスケット
JP2002217326A (ja) 半導体集積回路用基板の洗浄用治具
KR20010075619A (ko) 실리콘 웨이퍼들을 세정하기 위한 캐리어
CN215527679U (zh) 一种晶圆打点设备
JPH11196919A (ja) コンタクトレンズ収容容器
JPH0964162A (ja) 薄板用支持容器
JPS604252Y2 (ja) 超音波式レコ−ド針クリ−ナ
JPH0652982U (ja) 基板洗浄・乾燥用治具
JPH054484U (ja) ウエーハカセツト
JP3642445B2 (ja) シャーレ
JP3068762U (ja) コップ洗い器